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Hefei Zhenping There are electronic technology Co.,Ltd.With the design, manufacture, sales and after-sales service capabilities of the integrated enterprise
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HEFEI TRUE P ELECTRONIC TECHNOLOGY CO.,LTD.

Hotline: 400-608-2908

Fax: 0551-63484895

Add: Hefei National Economic and Technological Development Zone Su Song Road and Tsinghua Road, Enlightenment Science and Technology City, a space room A Building Room 1004-1007

Location: 首页  »   Products  »   Huangguang District equipment  »   Fully Automatic Vertical Pipe Furnace

Huangguang District equipment

Fully Automatic Vertical Pipe Furnace

Fully Automatic Vertical Pipe Furnace

  • Product Details
  • Features
  • Application Areas

Product features:           

 1. Integrated man-machine operation system, continuous automatic production, high efficiency, saving labor cost, power and process time.          

  2. FEC heating, rapid temperature rise and good uniformity           

 3. Made of high quality stainless steel, the surface is polished by physical and chemical methods to ensure cleanliness.           

 4. With self-cleaning function, it can clean the inner cavity with hydrogen

Control System

*The man-machine interface adopts touch screen mode

*The core controller adopts embedded controller

*The overtemperature protection is an independent detection device

*With oxygen content detection function

*The motion control is Servo / Step Control Unit

*Transport for Professional Crystal Transport robot

*SOFTWARE WITH FUNCTIONS: temperature control, atmosphere control, process editing, data recording, chart display.


Product use:   Integrated circuit wafer adhesive, BPO adhesive / PI adhesive / BCB adhesive curing, IC (wafer, CMOS, bumping, TSV, mens, fingerprint identification; rapid annealing of integrated circuit wafer


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