HMDS pretreatment system has five advantages introduced

Often someone asked me, HMDS pretreatment system in the market so good, what are the advantages of what? Today Xiaobian to come to tell you, HMDS pretreatment system has five advantages.

(1) The pretreatment performance is better, and there is no dust interference due to the HMDS treatment carried out after several times of nitrogen replacement. Further, since the system is a "de-baking" and HMDS treatment In the same process, the same container, the wafer in the container after 100 ℃ -200 ℃ to the water baking, followed by HMDS treatment, do not need to come from the container, and exposure to the atmosphere, the chip absorb water Molecular opportunities greatly reduced, so have a better treatment effect.

(2) processing more uniform. Since it is applied to the surface of the wafer in the form of steam, there is a liquid coating that is not comparable to the uniformity.

(3) high efficiency. Liquid coating is a single chip operation, and the system can handle up to more than one chip at a time.

(4) more savings in liquid. Practice has proved that the use of liquid HMDS coated monolithic liquid used by the system than the use of the system to deal with multi-chip liquid more;

(5) more environmentally friendly and safe, HMDS is a toxic chemical, people will be inhaled after nausea, vomiting, abdominal pain, stimulate the chest, respiratory, etc., because the whole process is completed in a closed environment, so no one access to drugs Liquid and its steam, it is more secure, its exhaust is directly from the mechanical pump to the exhaust treatment machine, so it will not cause pollution to the environment.